NEWS 29 October 2024
Nonlinear control takes over?
The ever increasing demands on precision and throughput in semiconductor manufacturing machines challenge today's linear control designs.
For that reason, the industry is slowly starting to witness a shift toward more flexible, but also more complex nonlinear control methods. This Mikroniek article discusses the use of nonlinear integrators that can boost the performance of high-precision motion systems such as wafer scanners and wire bonders. (Image courtesy of ASMPT)